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Influence of methane concentration on diamond film morphology and growth rate
 Ižák, Tibor ; Babchenko, Oleg ; Kromka, Alexander ; Potměšil, Jiří ; Hruška, Karel
In this study we investigated the influence of methane concentration on the diamond film growth. The experiments were carried out in focused microwave chemical vapour deposition system. The methane concentration was varied from 0.5% to 10 % of CH4 in H2 atmosphere. The final film morphology, chemical composition and growth rate were investigated by scanning electron microscopy (SEM), Raman spectroscopy and optical reflectance measurement. We observed, that increasing of CH4 concentration enhances the growth rate, but at the expense of the diamond film quality.
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